Tolstoy V.P., Chernyshova I.V., Skryshevsky V.A. Handbook of Infrared Spectroscopy of Ultrathin Films

Wiley, 2003. — 739 p.Acronyms and SymbolsAbsorption and Reflection of Infrared Radiation by Ultrathin Films
Optimum Conditions for Recording Infrared Spectra of Ultrathin Films
Interpretation of IR Spectra of Ultrathin Films
Equipment and Techniques
Infrared Spectroscopy of Thin Layers in Silicon Microelectronics
Application of Infrared Spectroscopy to Analysis of Interfaces and Thin Dielectric Layers in Semiconductor Technology
Ultrathin Films at Gas–Solid, Gas–Liquid, and Solid–Liquid Interfaces
Appendix